JPH0431254Y2 - - Google Patents

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Publication number
JPH0431254Y2
JPH0431254Y2 JP1986064499U JP6449986U JPH0431254Y2 JP H0431254 Y2 JPH0431254 Y2 JP H0431254Y2 JP 1986064499 U JP1986064499 U JP 1986064499U JP 6449986 U JP6449986 U JP 6449986U JP H0431254 Y2 JPH0431254 Y2 JP H0431254Y2
Authority
JP
Japan
Prior art keywords
quartz glass
crucible
transparent
cylindrical body
transparent quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986064499U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62175077U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986064499U priority Critical patent/JPH0431254Y2/ja
Publication of JPS62175077U publication Critical patent/JPS62175077U/ja
Application granted granted Critical
Publication of JPH0431254Y2 publication Critical patent/JPH0431254Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Glass Melting And Manufacturing (AREA)
JP1986064499U 1986-04-28 1986-04-28 Expired JPH0431254Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986064499U JPH0431254Y2 (en]) 1986-04-28 1986-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986064499U JPH0431254Y2 (en]) 1986-04-28 1986-04-28

Publications (2)

Publication Number Publication Date
JPS62175077U JPS62175077U (en]) 1987-11-06
JPH0431254Y2 true JPH0431254Y2 (en]) 1992-07-28

Family

ID=30900710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986064499U Expired JPH0431254Y2 (en]) 1986-04-28 1986-04-28

Country Status (1)

Country Link
JP (1) JPH0431254Y2 (en])

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0729871B2 (ja) * 1987-12-03 1995-04-05 信越半導体 株式会社 単結晶引き上げ用石英るつぼ
JP4548962B2 (ja) * 2001-03-28 2010-09-22 ジャパンスーパークォーツ株式会社 石英ガラスルツボ及びこれを用いたシリコン単結晶の引き上げ方法
JP2003081689A (ja) * 2001-09-10 2003-03-19 Kusuwa Kuorutsu:Kk 合成石英ルツボおよび製造方法
JP5121760B2 (ja) * 2009-03-16 2013-01-16 ジャパンスーパークォーツ株式会社 シリコン単結晶の引き上げを行う方法
JP5289294B2 (ja) * 2009-12-14 2013-09-11 株式会社Ｓｕｍｃｏ シリコン単結晶引上げ用石英ルツボ
JP5289293B2 (ja) * 2009-12-14 2013-09-11 株式会社Ｓｕｍｃｏ 単結晶引上げ用石英ルツボ
JP5685894B2 (ja) 2010-11-05 2015-03-18 信越半導体株式会社 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法
JP5741163B2 (ja) * 2011-04-11 2015-07-01 信越半導体株式会社 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法
JP5488519B2 (ja) * 2011-04-11 2014-05-14 信越半導体株式会社 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法
JP5668717B2 (ja) * 2012-04-19 2015-02-12 信越半導体株式会社 シリコン単結晶の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59213697A (ja) * 1983-05-20 1984-12-03 Toshiba Ceramics Co Ltd 単結晶半導体引上装置

Also Published As

Publication number Publication date
JPS62175077U (en]) 1987-11-06

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